Invention Grant
- Patent Title: Electroplating apparatus
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Application No.: US15695934Application Date: 2017-09-05
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Publication No.: US10822712B2Publication Date: 2020-11-03
- Inventor: Woo-Seok Cheong
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@395f061
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25D5/02 ; C25D21/10 ; C25D17/00 ; C25D17/12 ; C25D5/16 ; C25D5/18 ; H01L21/768 ; C25D17/06 ; C25D3/38

Abstract:
An electroplating apparatus includes a substrate, a seed layer provided on a top surface of the substrate, a high-voltage portion provided on a bottom surface of the substrate, a housing sealing the high-voltage portion, an anode structure spaced apart from the seed layer in a direction perpendicular to the top surface of the substrate, first power source generating a first voltage difference between the seed layer and the anode structure, and a second power source applying a second voltage to the high-voltage portion. A positive terminal of the first power source is electrically connected to the anode structure, and a negative terminal of the first power source is electrically connected to the seed layer.
Public/Granted literature
- US20180087174A1 ELECTROPLATING APPARATUS Public/Granted day:2018-03-29
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