Invention Grant
- Patent Title: Optical compensation film, photomask, and exposure apparatus
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Application No.: US16340149Application Date: 2018-12-26
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Publication No.: US10795256B2Publication Date: 2020-10-06
- Inventor: Xing Xiong
- Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Wuhan
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@39c66bdc
- International Application: PCT/CN2018/123805 WO 20181226
- International Announcement: WO2019/129031 WO 20190704
- Main IPC: G03F1/38
- IPC: G03F1/38 ; G03F7/20 ; B29D11/00

Abstract:
The present disclosure provides an optical compensation film, a photomask, and an exposure apparatus. The optical compensation film includes a first region of the optical compensation film and a second region of the optical compensation film. The first region of the optical compensation film is positioned to correspond to an overlapping portion of the prisms, and is configured to allow light to pass therethrough and impinge on the overlapping portion of the prisms. The second region of the optical compensation film is positioned to correspond to a non-overlapping portion of the prisms, and is configured to allow light to pass therethrough and impinge on the non-overlapping portion of the prisms. Light transmittance of the first region of the optical compensation film is greater than light transmittance of the second region of the optical compensation film.
Public/Granted literature
- US20200142295A1 OPTICAL COMPENSATION FILM, PHOTOMASK, AND EXPOSURE APPARATUS Public/Granted day:2020-05-07
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