- 专利标题： Electromagnetic wave detector and electromagnetic wave detector array
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申请号： US16305465申请日： 2017-04-20
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公开(公告)号： US10784394B2公开(公告)日： 2020-09-22
- 发明人: Shimpei Ogawa , Daisuke Fujisawa , Masaaki Shimatani , Satoshi Okuda
- 申请人： Mitsubishi Electric Corporation
- 申请人地址： JP Tokyo
- 专利权人： MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人： MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Xsensus LLP
- 优先权： com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@30d94849
- 国际申请： PCT/JP2017/015832 WO 20170420
- 国际公布： WO2018/012076 WO 20180118
- 主分类号： H01L31/113
- IPC分类号： H01L31/113 ; H01L27/14 ; G01J1/42 ; H01L27/144 ; H01L31/0224 ; H01L31/028
摘要：
An electromagnetic wave detector, which photoelectrically converts and detects an electromagnetic wave incident on a graphene layer, including: a substrate having a front surface and a back surface; a lower insulating layer provided on the front surface of the substrate; a ferroelectric layer and a pair of electrodes provided on the lower insulating layer, the pair of electrodes arranged to face each other with the ferroelectric layer sandwiched therebetween; an upper insulating layer provided on the ferroelectric layer; and a graphene layer arranged on the lower insulating layer and the upper insulating layer to connect the two electrodes. Alternatively, the electromagnetic wave detector includes: a graphene layer provided on the lower insulating layer; and a ferroelectric layer provided on the graphene layer with an upper insulating layer interposed therebetween and a pair of electrodes provided on the graphene layer to face each other with the ferroelectric layer sandwiched therebetween.
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