- 专利标题: Wafer level package structure and wafer level packaging method
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申请号: US16229850申请日: 2018-12-21
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公开(公告)号: US10784229B2公开(公告)日: 2020-09-22
- 发明人: Hailong Luo , Clifford Ian Drowley
- 申请人: Ningbo Semiconductor International Corporation
- 申请人地址: CN Ningbo
- 专利权人: Ningbo Semiconductor International Corporation
- 当前专利权人: Ningbo Semiconductor International Corporation
- 当前专利权人地址: CN Ningbo
- 代理机构: Anova Law Group, PLLC
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@78f684ec
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L23/00 ; H01L21/56 ; H01L23/31 ; H01L25/065 ; H01L25/00
摘要:
Wafer level package structures and packaging methods are provided. An exemplary method includes providing a device wafer having a first front surface and a first back surface opposing the first front surface, wherein at least one first chip is integrated in the first front surface; forming a first oxide layer on the first front surface of the device wafer; providing at least one second chip having a to-be-bonded surface; forming a second oxide layer on the to-be-bonded surface of each second chip; providing a carrier wafer; temporally bonding a surface of the second chip opposing the second oxide layer to the carrier wafer; forming an encapsulation layer on the carrier wafer between adjacent second chips of the at least one second; and bonding the device wafer and the second chip by bonding the first oxide layer with the second oxide layer by a low-temperature fusion bonding process.
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