- 专利标题: Inspection system and inspection method
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申请号: US15129273申请日: 2015-03-31
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公开(公告)号: US10724960B2公开(公告)日: 2020-07-28
- 发明人: Toru Kurihara , Shigeru Ando , Michihiko Yoshimura
- 申请人: The University of Tokyo , RICOH ELEMEX CORPORATION
- 申请人地址: JP Tokyo JP Aichi JP Koichi
- 专利权人: The University of Tokyo,Ricoh Elemex Corporation,Kochi Prefectural Public University Corporation
- 当前专利权人: The University of Tokyo,Ricoh Elemex Corporation,Kochi Prefectural Public University Corporation
- 当前专利权人地址: JP Tokyo JP Aichi JP Koichi
- 代理机构: McDermott Will & Emery LLP
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@30d8158b
- 国际申请: PCT/JP2015/060277 WO 20150331
- 国际公布: WO2015/152307 WO 20151008
- 主分类号: G01N21/88
- IPC分类号: G01N21/88
摘要:
An inspection system of an embodiment includes: a planar illumination unit that temporally varies an intensity of light in a periodic manner by spatially moving a stripe pattern of the intensity of light; a time-correlation image generator that generates a time-correlation image with a time-correlation camera or an image capturing system that performs an operation equivalent to that of the time-correlation camera; and a calculation processor that calculates a characteristic from the time-correlation image, the characteristic corresponding to a distribution of normal vectors to an inspection target surface and serving to detect an abnormality based on at least either a difference from a surrounding area or a difference from a reference surface.
公开/授权文献
- US20170115230A1 INSPECTION SYSTEM AND INSPECTION METHOD 公开/授权日:2017-04-27
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