- 专利标题: Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same
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申请号: US16428922申请日: 2019-05-31
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公开(公告)号: US10707738B2公开(公告)日: 2020-07-07
- 发明人: Xiaodong Lu
- 申请人: The University of British Columbia
- 申请人地址: CA Vancouver
- 专利权人: The University of British Columbia
- 当前专利权人: The University of British Columbia
- 当前专利权人地址: CA Vancouver
- 代理机构: Oyen Wiggs Green & Mutala LLP
- 代理商 Todd A. Rattray
- 主分类号: H02K41/00
- IPC分类号: H02K41/00 ; H02K41/03 ; H02P25/064 ; H02P25/066
摘要:
A displacement device includes a stator having non-parallel stator-x and stator-y elongated traces. The device includes a moveable stage having a first magnet array with first magnetization segments linearly elongated in a stage-x direction and having magnetization directions generally orthogonal to the stage-x direction. The first magnet array incorporates a first pair of adjacent first magnetization segments having two first magnetization segments adjacent to one another in a stage-y direction non-parallel to the stage-x direction. Each first magnetization segment in the first pair has a corresponding magnetization direction oriented at a corresponding angle αn about a corresponding stage-x axis as measured from a positive stage-z direction that is generally orthogonal to both the stator-x and stator-y directions. The corresponding angle αn is one of 45°+n90° where n is any integer. Each first magnetization segment in the first pair has a different magnetization direction.
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