Invention Grant
- Patent Title: Evaporation source cover, evaporation source and evaporation apparatus
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Application No.: US15855879Application Date: 2017-12-27
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Publication No.: US10689751B2Publication Date: 2020-06-23
- Inventor: Changqi Hu , Shupeng Guo
- Applicant: Boe Technology Group Co., Ltd. , Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing CN Hefei, Anhui
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Hefei, Anhui
- Agency: Womble Bond Dickinson (US) LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2af2c205
- Main IPC: C23C14/02
- IPC: C23C14/02 ; C23C14/24 ; C23C14/54

Abstract:
An evaporation source cover, an evaporation source and an evaporation apparatus are disclosed. The evaporation source cover comprises a cover body and an elastic dredging member which is arranged on the cover body. The elastic dredging member comprises a bottom part and a top part. The elastic dredging member is fixed to a surface of the cover body at the bottom part. The elastic dredging member is configured to extend and contract in a direction perpendicular to the surface of the cover body.
Public/Granted literature
- US20180258522A1 EVAPORATION SOURCE COVER, EVAPORATION SOURCE AND EVAPORATION APPARATUS Public/Granted day:2018-09-13
Information query
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