发明授权
- 专利标题: Magnetic shielding package structure for MRAM device and method for producing the same
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申请号: US16298663申请日: 2019-03-11
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公开(公告)号: US10686008B2公开(公告)日: 2020-06-16
- 发明人: Shan Gao , Boo Yang Jung
- 申请人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- 当前专利权人: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Ditthavong & Steiner, P.C.
- 主分类号: H01L43/00
- IPC分类号: H01L43/00 ; H01L27/22 ; H01L25/065 ; H05K1/02 ; H01L23/552 ; H01L23/00 ; H01L43/02 ; H01L43/12 ; H05K1/05 ; H05K1/09 ; H05K1/11 ; H05K3/32 ; H05K3/40
摘要:
Methods of magnetically shielding an MRAM structure on all six sides in a thin wire or thin flip chip bonding package and the resulting devices are provided. Embodiments include forming a first metal layer embedded between an upper and a lower portion of a PCB substrate, the first metal layer having a pair of metal filled vias laterally separated; attaching a semiconductor die to the upper portion of the PCB substrate between the pair of metal filled vias; connecting the semiconductor die electrically to the PCB substrate through the pair of metal filled vias; removing a portion of the upper portion of the PCB substrate outside of the pair of metal filled vias down to the first metal layer; and forming a second metal layer over and on four opposing sides of the semiconductor die, the second metal layer landed on the first metal layer.
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