Invention Grant
- Patent Title: EUV exposure apparatus with reflective elements having reduced influence of temperature variation
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Application No.: US16392220Application Date: 2019-04-23
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Publication No.: US10684551B2Publication Date: 2020-06-16
- Inventor: Norman Baer , Ulrich Loering , Oliver Natt , Gero Wittich , Timo Laufer , Peter Kuerz , Guido Limbach , Stefan Hembacher , Holger Walter , Yim-Bun-Patrick Kwan , Markus Hauf , Franz-Josef Stickel , Jan Van Schoot
- Applicant: Carl Zeiss SMT GmbH , ASML Netherlands B.V.
- Applicant Address: DE Oberkochen NL Veldhoven
- Assignee: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- Current Assignee: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- Current Assignee Address: DE Oberkochen NL Veldhoven
- Agency: Walter Ottesen, P.A.
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B5/08 ; G02B7/18 ; G02B27/00 ; G03B27/54 ; G02B5/00 ; B82Y10/00 ; G02B17/06 ; G21K1/06 ; G02B3/00

Abstract:
A projection lens of an EUV-lithographic projection exposure system with at least two reflective optical elements each comprising a body and a reflective surface for projecting an object field on a reticle onto an image field on a substrate if the projection lens is exposed with an exposure power of EUV light, wherein the bodies of at least two reflective optical elements comprise a material with a temperature dependent coefficient of thermal expansion which is zero at respective zero cross temperatures, and wherein the absolute value of the difference between the zero cross temperatures is more than 6K.
Public/Granted literature
- US20190310555A1 EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFLUENCE OF TEMPERATURE VARIATION Public/Granted day:2019-10-10
Information query
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