- 专利标题: Self-gated RRAM cell and method for manufacturing the same
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申请号: US15525200申请日: 2014-12-26
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公开(公告)号: US10608177B2公开(公告)日: 2020-03-31
- 发明人: Hangbing Lv , Ming Liu , Qi Liu , Shibing Long
- 申请人: Institute of Microelectronics, Chinese Academy of Sciences
- 申请人地址: CN Beijing
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 国际申请: PCT/CN2014/095080 WO 20141226
- 国际公布: WO2016/101246 WO 20160630
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00
摘要:
The present disclosure discloses a self-gated RRAM cell and a manufacturing method thereof; which belong to the field of microelectronic technology. The self-gated RRAM cell comprises: a stacked structure containing multiple layers of conductive lower electrodes; a vertical trench formed by etching the stacked structure; a M8XY6 gated layer formed on an inner wall and a bottom of the vertical trench; a resistance transition layer formed on a surface of the M8XY6, gated layer; and a conductive upper electrode formed on a surface of the resistance transition layer, the vertical trench being filled with the conductive upper electrode. The present disclosure is implemented on a basis of using the self-gated RRAM as a memory cell. It may not depend on a gated transistor and a diode, but relies on a non-linear variation characteristic of resistance of its own varied with voltage to achieve a self-gated function, which has a simple structure, easy integration, high density and low cost, capable of suppressing a reading crosstalk phenomenon in a cross array structure; and is also adapted for a planar stacked cross array structure and a vertical cross array structure, achieving 3D storage with a high density.
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