- 专利标题: Solar cell manufacturing method
-
申请号: US15743099申请日: 2015-10-21
-
公开(公告)号: US10586880B2公开(公告)日: 2020-03-10
- 发明人: Hiroaki Morikawa , Hirohisa Nishino , Yukiko Nakazawa , Atsuro Hama , Yuichiro Hosokawa
- 申请人: Mitsubishi Electric Corporation
- 申请人地址: JP Chiyoda-Ku, Tokyo
- 专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人: MITSUBISHI ELECTRIC CORPORATION
- 当前专利权人地址: JP Chiyoda-Ku, Tokyo
- 代理机构: Buchanan Ingersoll & Rooney PC
- 国际申请: PCT/JP2015/079744 WO 20151021
- 国际公布: WO2017/068671 WO 20170427
- 主分类号: H01L27/30
- IPC分类号: H01L27/30 ; H01L31/0216 ; H01L21/66 ; H01L31/18 ; G01N21/88 ; H01L31/0224 ; H01L31/068
摘要:
A solar cell manufacturing method includes a step of forming a diffusion layer including a first section and a second section on a light-receiving side of a semiconductor substrate, where the first section has a first concentration of impurities, and the second section has a second concentration of the impurities that is higher than the first concentration, a step of irradiating the diffusion layer with detection light that is reflected at a higher reflectivity on the first section than on the second section, and a step of detecting the first section that corresponds to a first reflectivity, and the second section that corresponds to a second reflectivity that is lower than the first reflectivity in the diffusion layer on the basis of a difference in reflectivity of the detection light reflected off the respective sections of the diffusion layer.
公开/授权文献
- US20190081188A1 SOLAR CELL MANUFACTURING METHOD 公开/授权日:2019-03-14
信息查询
IPC分类: