Invention Grant
- Patent Title: 30 nm in-line LPC testing and cleaning of semiconductor processing equipment
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Application No.: US15487213Application Date: 2017-04-13
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Publication No.: US10583465B2Publication Date: 2020-03-10
- Inventor: Jianqi Wang , William Ming-ye Lu , Yixing Lin , Kevin A. Papke
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: B08B3/12
- IPC: B08B3/12 ; G01N1/38 ; G01N15/14 ; G01N1/02

Abstract:
The implementations described herein generally relate to 30 nm in-line liquid particle count testing equipment which analyses and cleans semiconductor processing equipment. More specifically, the implementations described relate to a system for diluting, analyzing, and modifying fluids to enable the observation of the contents of the fluids. A dilution sampling tool is coupled with a liquid particle detector for reading the contents of an extraction solution containing particles from semiconductor processing equipment, such as a liner, a shield, a faceplate, or a showerhead, in a cleaning tank. As such, accurate liquid particle readings may be had which reduce oversaturation of the particle detector.
Public/Granted literature
- US20170299487A1 30 NM IN-LINE LPC TESTING AND CLEANING OF SEMICONDUCTOR PROCESSING EQUIPMENT Public/Granted day:2017-10-19
Information query
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