- 专利标题: Masks, method to inspect and adjust mask position, and method to pattern pixels of organic light-emitting display device utilizing the masks
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申请号: US16292288申请日: 2019-03-04
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公开(公告)号: US10566533B2公开(公告)日: 2020-02-18
- 发明人: Sangshin Lee , Dongjin Ha , Mingoo Kang , Ohseob Kwon , Sangmin Yi
- 申请人: Samsung Display Co., Ltd.
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: H.C. Park & Associates, PLC
- 优先权: KR10-2015-0069351 20150519
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/56 ; H01L27/32 ; H01L51/50
摘要:
A method for pixel patterning and pixel position inspection of an organic light-emitting display device includes: forming, on a substrate using a first mask, a thin film layer of a first color corresponding to a first pixel pattern and a first pixel positioning pattern for inspecting a position of a first pixel; shifting, by a determined pitch, the first mask from a position associated with forming the thin film layer of the first color; aligning the shifted first mask with respect to the substrate; and forming, on the substrate using the shifted first mask, a thin film layer of a second color corresponding to the first pixel pattern and another first pixel positioning pattern for inspecting a position of a second pixel.
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