- 专利标题： Optimization of high resolution digitally encoded laser scanners for fine feature marking
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申请号： US15804802申请日： 2017-11-06
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公开(公告)号： US10559395B2公开(公告)日： 2020-02-11
- 发明人: Ken Gross
- 申请人： nLIGHT, Inc.
- 申请人地址： US WA Vancouver
- 专利权人： nLIGHT, Inc.
- 当前专利权人： nLIGHT, Inc.
- 当前专利权人地址： US WA Vancouver
- 代理机构： Klarquist Sparkman, LLP
- 主分类号： G02B26/08
- IPC分类号： G02B26/08 ; G21K5/04 ; H05K3/02 ; H01L31/18 ; H05K1/03
摘要：
Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.
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