- 专利标题: Laterally tailoring current injection for laser diodes
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申请号: US16217331申请日: 2018-12-12
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公开(公告)号: US10547159B1公开(公告)日: 2020-01-28
- 发明人: Carlo Holly , Stefan Heinemann , Suhit Ranjan Das , Prasanta Modak
- 申请人: Trumpf Photonics Inc.
- 申请人地址: US NJ Cranbury
- 专利权人: Trumpf Photonics Inc.
- 当前专利权人: Trumpf Photonics Inc.
- 当前专利权人地址: US NJ Cranbury
- 代理机构: Fish & Richardson P.C.
- 主分类号: H01S5/00
- IPC分类号: H01S5/00 ; H01S5/042 ; H01S5/06 ; H01S5/40 ; H01S5/20 ; H01S5/30 ; H01S5/323 ; H01S5/343 ; H01S5/327
摘要:
A semiconductor laser diode includes multiple layers stacked along a first direction, in which the multiple layers include: a first multiple of semiconductor layers; an optical waveguide on the first multiple of semiconductor layers, in which the optical waveguide includes a semiconductor active region for generating laser light, and in which the optical waveguide defines a resonant cavity having an optical axis; and a second multiple of semiconductor layers on the optical waveguide region, in which a resistivity profile of at least one layer of the multiple layers varies gradually between a maximum resistivity and a minimum resistivity along a second direction extending orthogonal to the first direction, in which a distance between the maximum resistivity and the minimum resistivity is greater than at least about 2 microns.
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