- 专利标题: Variable resistance memory devices and methods of manufacturing the same
-
申请号: US15346751申请日: 2016-11-09
-
公开(公告)号: US10546999B2公开(公告)日: 2020-01-28
- 发明人: Masayuki Terai , Dae-Hwan Kang , Gwan-Hyeob Koh
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2016-0018304 20160217
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A variable resistance memory device and a method of manufacturing the same, the device including first conductive lines disposed in a first direction on a substrate, each of the first conductive lines extending in a second direction crossing the first direction, and the first and second directions being parallel to a top surface of the substrate; second conductive lines disposed in the second direction over the first conductive lines, each of the second conductive lines extending in the first direction; a memory unit between the first and second conductive lines, the memory unit being in each area overlapping the first and second conductive lines in a third direction substantially perpendicular to the top surface of the substrate, and the memory unit including a variable resistance pattern; and an insulation layer structure between the first and second conductive lines, the insulation layer structure covering the memory unit and including an air gap in at least a portion of an area overlapping neither the first conductive lines nor the second conductive lines in the third direction.
公开/授权文献
信息查询
IPC分类: