- 专利标题: Silicon photonics integration method and structure
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申请号: US15980014申请日: 2018-05-15
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公开(公告)号: US10546962B2公开(公告)日: 2020-01-28
- 发明人: Solomon Assefa , Tymon Barwicz , William M. Green , Marwan H. Khater , Jessie C. Rosenberg , Steven M. Shank
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Steven Meyers; Andrew M. Calderon
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L31/0203 ; H01L31/0216 ; H01L31/18 ; H01L27/144 ; G02B6/12 ; H01L21/3205 ; H01L31/0232 ; G02B6/42 ; H01L31/02 ; H01L31/153 ; H01L21/84 ; H01L49/02
摘要:
Approaches for silicon photonics integration are provided. A method includes: forming at least one encapsulating layer over and around a photodetector; thermally crystallizing the photodetector material after the forming the at least one encapsulating layer; and after the thermally crystallizing the photodetector material, forming a conformal sealing layer on the at least one encapsulating layer and over at least one device. The conformal sealing layer is configured to seal a crack in the at least one encapsulating layer. The photodetector and the at least one device are on a same substrate. The at least one device includes a complementary metal oxide semiconductor device or a passive photonics device.
公开/授权文献
- US20180269338A1 SILICON PHOTONICS INTEGRATION METHOD AND STRUCTURE 公开/授权日:2018-09-20
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