- 专利标题: Method of manufacturing a bipolar transistor with trench structure
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申请号: US16427356申请日: 2019-05-31
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公开(公告)号: US10535753B2公开(公告)日: 2020-01-14
- 发明人: Qiaozhi Zhu , Wei Liu
- 申请人: Shanghai Huali Microelectronics Corporation
- 代理机构: Kilpatrick Townsend & Stockton, LLP
- 优先权: CN201711374117 20171219
- 主分类号: H01L21/8222
- IPC分类号: H01L21/8222 ; H01L29/66 ; H01L21/02 ; H01L29/165 ; H01L29/08 ; H01L29/78
摘要:
The present disclosure relates to a semiconductor structure and a manufacturing process therefor. Provided is a method for manufacturing a bipolar transistor with a trench structure, including providing a semiconductor substrate; fabricating a shallow trench isolation structure to define a device active area; forming an N-type well and a P-type well in the active area to define a first region, a second region and a third region of the bipolar transistor; etching a portion, adjacent to the shallow trench isolation structure, in the first region to form a trench; performing ion implantation to form an emitter, a base and a collector of the bipolar transistor; forming a salicide block structure in the trench; and forming a metal electrode of the bipolar transistor, wherein the emitter is formed in the first region. The present disclosure further provides a bipolar transistor with a trench structure.
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