- 专利标题: Three-zone carrier head and flexible membrane
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申请号: US14078019申请日: 2013-11-12
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公开(公告)号: US10532441B2公开(公告)日: 2020-01-14
- 发明人: Jeonghoon Oh , Jamie Leighton
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson P.C.
- 主分类号: B24B37/27
- IPC分类号: B24B37/27 ; B24B37/30
摘要:
A flexible membrane for a carrier head of a chemical mechanical polisher includes a main portion, an annular outer portion, and three annular flaps. The main portion has a substrate mounting surface with a radius R. The annular outer portion extends upwardly from an outer edge of the main portion and has a lower edge connected to the main portion and an upper edge. The three annular flaps include a first annular flap joined to an inner surface of the main portion at a radial position between 75% and 95% of R, a second inwardly-extending annular flap joined to the annular outer portion at a position between the lower edge and the upper edge, and a third inwardly-extending annular flap joined to the upper edge of the annular outer portion.
公开/授权文献
- US20140150974A1 THREE-ZONE CARRIER HEAD AND FLEXIBLE MEMBRANE 公开/授权日:2014-06-05
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