Invention Grant
- Patent Title: Method of cutting conductive patterns
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Application No.: US15189311Application Date: 2016-06-22
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Publication No.: US10509322B2Publication Date: 2019-12-17
- Inventor: Chin-Hsiung Hsu , Huang-Yu Chen , Tsong-Hua Ou , Wen-Hao Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H05K3/06
- IPC: H05K3/06 ; G03F7/20 ; H05K3/00 ; G03F1/70 ; G06F17/50 ; H01L21/3213

Abstract:
A method includes patterning a layer over a substrate with a first metal pattern; using a cut mask in a first position relative to the substrate to perform a first cut patterning for removing material from a first region within the first pattern; and using the same cut mask to perform a second cut patterning while in a second position relative to the same layer over the substrate, for removing material from a second region in a second metal pattern of the same layer over the substrate.
Public/Granted literature
- US20160320706A1 METHOD OF CUTTING CONDUCTIVE PATTERNS Public/Granted day:2016-11-03
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