- 专利标题: Vacuum drying system and vacuum drying method
-
申请号: US15326754申请日: 2016-08-03
-
公开(公告)号: US10508860B2公开(公告)日: 2019-12-17
- 发明人: Yusheng An , Qingyong Meng
- 申请人: Boe Technology Group Co., Ltd. , Hefei Boe Optoelectronics Technology Co., Ltd.
- 申请人地址: CN Beijing CN Anhui
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Beijing CN Anhui
- 代理机构: Calfee, Halter & Griswold LLP
- 优先权: CN201510744626 20151104
- 国际申请: PCT/CN2016/092993 WO 20160803
- 国际公布: WO2017/076081 WO 20170511
- 主分类号: F26B25/00
- IPC分类号: F26B25/00 ; B65G47/90
摘要:
A vacuum drying system includes: a support platform, which is used to support the substrate, wherein the support platform comprises a plurality of sub-platforms which are arranged along a predetermined direction and there are gaps between the adjacent sub-platforms; a mechanical arm which comprises a plurality of strip structures at positions corresponding to the gaps, and is used to place the substrate onto the support platform or move the substrate out of the support platform. Comparing to the prior art wherein the substrate is supported by a plurality of needle-shaped supports in the vacuum drying process, in the technical solution of the present disclosure, the contact area between the support platform and the substrate is much larger, which can reduce the local pressure on the substrate, thereby avoiding the display brightness mura of the substrate caused by the supporting operation in the vacuum drying process.
公开/授权文献
- US20170268822A1 VACUUM DRYING SYSTEM AND VACUUM DRYING METHOD 公开/授权日:2017-09-21
信息查询
IPC分类: