Invention Grant
- Patent Title: MEMS device and process
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Application No.: US15708822Application Date: 2017-09-19
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Publication No.: US10477322B2Publication Date: 2019-11-12
- Inventor: Aleksey Sergeyevich Khenkin , Tsjerk Hans Hoekstra
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: GB1618354.3 20161031
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/00 ; H04R31/00 ; H04R1/04

Abstract:
The application describes a MEMS transducer comprising:a substrate; a primary membrane supported in a fixed relation relative to the substrate and a secondary membrane provided in a plane overlying the primary membrane. The secondary membrane is mechanically coupled to the primary membrane by a substantially rigid coupling structure. A rigid support plate may be interposed between the primary and secondary membranes.
Public/Granted literature
- US20180091906A1 MEMS DEVICE AND PROCESS Public/Granted day:2018-03-29
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