Invention Grant
- Patent Title: Memory device and method for fabricating the same
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Application No.: US16188397Application Date: 2018-11-13
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Publication No.: US10475811B2Publication Date: 2019-11-12
- Inventor: Erh-Kun Lai , Hsiang-Lan Lung
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L21/8228
- IPC: H01L21/8228 ; H01L27/11582 ; H01L27/1157 ; H01L21/28 ; H01L29/423

Abstract:
A memory device memory device includes a multi-layers stack, a charge-trapping layer, a first channel layer and a SSL switch. The multi-layers stack includes a plurality of insulating layers, a plurality of conductive layers alternatively stacked with the insulating layers and at least one first through opening passing through the conductive layers. The charge-trapping layer blankets over a sidewall of the first through opening. The first channel layer is disposed in the first through opening. The SSL switch is disposed on the multi-layers stack and includes a second channel layer, a gate dielectric layer and a gate. The second channel layer is disposed on and electrically contacting to the first channel layer. The gate dielectric layer is disposed on the second channel layer and made of a material other than that for making the charge-trapping layer. The gate is disposed on the gate dielectric layer.
Public/Granted literature
- US20190096907A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2019-03-28
Information query
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