- 专利标题: SiC single crystal and method for producing same
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申请号: US15195071申请日: 2016-06-28
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公开(公告)号: US10415152B2公开(公告)日: 2019-09-17
- 发明人: Takayuki Shirai
- 申请人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 申请人地址: JP Toyota
- 专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人地址: JP Toyota
- 代理机构: Oliff PLC
- 优先权: JP2015-138120 20150709
- 主分类号: C30B19/10
- IPC分类号: C30B19/10 ; C30B19/06 ; C30B19/04 ; C30B19/12 ; C30B29/36 ; C01B32/956
摘要:
A p-type SiC single crystal having lower resistivity than the prior art is provided. This is achieved by a method for producing a SiC single crystal in which a SiC seed crystal substrate is contacted with a Si—C solution having a temperature gradient such that the temperature decreases from the interior toward the surface, to grow a SiC single crystal, the method comprising: using as the Si—C solution a Si—C solution containing Si, Cr and Al, wherein the Al content is 3 at % or greater based on the total of Si, Cr and Al; and contacting a (0001) face of the SiC seed crystal substrate with the Si—C solution to grow a SiC single crystal from the (0001) face.
公开/授权文献
- US20170009374A1 SIC SINGLE CRYSTAL AND METHOD FOR PRODUCING SAME 公开/授权日:2017-01-12
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