Invention Grant
- Patent Title: Integrated sensor and homologous calibration structure for resonant devices
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Application No.: US15636599Application Date: 2017-06-28
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Publication No.: US10386204B2Publication Date: 2019-08-20
- Inventor: Sasha Oster , Feras Eid , Thomas L. Sounart , Georgios C. Dogiamis
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal, LLP.
- Main IPC: G01C25/00
- IPC: G01C25/00 ; G01C19/5656 ; G01P15/08 ; G01P1/02 ; G01P1/00 ; G01P15/18 ; G01P15/097 ; G01P21/00
Abstract:
An apparatus is provided which comprises: a substrate; a sensor including a sensing element, wherein the sensor is integrated within the substrate; and a calibration structure integrated within the substrate, wherein the calibration structure is to exhibit one or more physical or chemical properties same as the sensor but without the sensing element.
Public/Granted literature
- US20190003854A1 INTEGRATED SENSOR AND HOMOLOGOUS CALIBRATION STRUCTURE FOR RESONANT DEVICES Public/Granted day:2019-01-03
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