- 专利标题: Cross-point memory and methods for fabrication of same
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申请号: US16112570申请日: 2018-08-24
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公开(公告)号: US10367033B2公开(公告)日: 2019-07-30
- 发明人: Ombretta Donghi , Marcello Ravasio , Samuele Sciarrillo , Roberto Somaschini
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Holland & Hart LLP
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00
摘要:
A method of fabricating a memory device is disclosed. In one aspect, the method comprises patterning a first conductive line extending in a first direction. The method additionally includes forming a free-standing pillar of a memory cell stack on the first conductive line after patterning the first conductive line. Forming the free-standing pillar includes depositing a memory cell stack comprising a selector material and a storage material over the conductive line and patterning the memory cell stack to form the free-standing pillar. The method further includes patterning a second conductive line on the pillar after patterning the memory cell stack, the second conductive line extending in a second direction crossing the first direction.
公开/授权文献
- US20190067372A1 CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME 公开/授权日:2019-02-28
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