Invention Grant
- Patent Title: Plasma processing apparatus and plasma processing method
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Application No.: US15888161Application Date: 2018-02-05
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Publication No.: US10361111B2Publication Date: 2019-07-23
- Inventor: Shogo Okita , Takahiro Miyai
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2017-028453 20170217
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32 ; H01L21/67 ; H01L21/78 ; H01L21/3065 ; H01L21/66 ; H01J37/00 ; H01L21/687

Abstract:
Provided is a plasma processing apparatus which comprises a chamber, a stage configured to set a holding sheet and a substrate held thereon, a securing mechanism configured to secure the holding sheet on the stage, a plasma generator including a first electrode and a first high-frequency power supply, and a determiner for determining a contact status between the holding sheet and the stage, wherein a gas through-hole is arranged on a surface of the stage in an annular region defined between an inner edge of a frame set on the stage and an outer edge of the substrate, and wherein the determiner is configured to determine the contact status in accordance with a pressure of a gas in the gas introduction conduit and/or a regulation data for regulating the pressure of the gas, the gas being introduced between the stage and the holding sheet from the gas through-hole.
Public/Granted literature
- US20180240697A1 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Public/Granted day:2018-08-23
Information query
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