Invention Grant
- Patent Title: Low-temperature polycrystalline silicon array substrate and manufacturing method, display panel
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Application No.: US15578562Application Date: 2017-10-13
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Publication No.: US10355034B2Publication Date: 2019-07-16
- Inventor: Tao Wang
- Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD
- Applicant Address: CN Wuhan, Hubei
- Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Wuhan, Hubei
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Kongsik Kim; Jhongwoo Jay Peck
- Priority: CN201710717966.0 20170821
- International Application: PCT/CN2017/105962 WO 20171013
- International Announcement: WO2019/037210 WO 20190228
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/3213 ; H01L21/02 ; H01L21/285 ; H01L29/66 ; H01L29/786

Abstract:
The present disclosure provides a low-temperature polycrystalline silicon array substrate which includes a substrate, a groove disposed on the substrate, a buffer layer disposed on the substrate, and a polycrystalline silicon active layer disposed on the buffer layer, the groove is located at a channel of a thin film transistor, and the buffer layer covers the groove to form an air layer in the groove. The present disclosure further provides a manufacturing method of a low-temperature polycrystalline silicon array substrate, mainly including: manufacturing a groove at a channel of a thin film transistor on a substrate; depositing a metal sacrificial layer on the substrate, and etching the metal sacrificial layer except the groove through an etching process; sequentially forming a buffer layer and an amorphous silicon layer on the substrate; and removing the metal sacrificial layer in the groove to form an air layer in the groove.
Public/Granted literature
- US20190057986A1 LOW-TEMPERATURE POLYCRYSTALLINE SILICON ARRAY SUBSTRATE AND MANUFACTURING METHOD, DISPLAY PANEL Public/Granted day:2019-02-21
Information query
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