Invention Grant
- Patent Title: MEMS-based structure for pico speaker
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Application No.: US15117169Application Date: 2014-02-08
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Publication No.: US10284961B2Publication Date: 2019-05-07
- Inventor: Mordehai Margalit
- Applicant: EMPIRE TECHNOLOGY DEVELOPMENT LLC
- Applicant Address: US DE Wilmington
- Assignee: Empire Technology Development LLC
- Current Assignee: Empire Technology Development LLC
- Current Assignee Address: US DE Wilmington
- International Application: PCT/US2014/015438 WO 20140208
- International Announcement: WO2015/119626 WO 20150813
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R19/02 ; H04R19/00 ; H04R7/10 ; G10K11/22

Abstract:
Techniques described herein generally include methods and systems related to a MEMS-based audio speaker system that includes a first movable element, formed from a first layer of a semiconductor substrate, and a second movable element, formed from a second layer of the semiconductor substrate that is a different layer than the first layer of the semiconductor substrate. The first movable element may be configured to oscillate along a first directional path substantially orthogonal to the first plane.
Public/Granted literature
- US20160360321A1 MEMS-BASED STRUCTURE FOR PICO SPEAKER Public/Granted day:2016-12-08
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