- 专利标题: Stripping compositions for removing photoresists from semiconductor substrates
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申请号: US15597395申请日: 2017-05-17
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公开(公告)号: US10266799B2公开(公告)日: 2019-04-23
- 发明人: Atsushi Mizutani , William A. Wojtczak , Yasuo Sugishima
- 申请人: Fujifilm Electronic Materials U.S.A., Inc.
- 申请人地址: US RI N. Kingstown
- 专利权人: Fujifilm Electronic Materials U.S.A., Inc.
- 当前专利权人: Fujifilm Electronic Materials U.S.A., Inc.
- 当前专利权人地址: US RI N. Kingstown
- 代理机构: Fish & Richardson P.C.
- 主分类号: C11D7/50
- IPC分类号: C11D7/50 ; C11D11/00 ; C11D3/00 ; C11D3/20 ; C11D3/28 ; C11D3/30 ; C11D3/34 ; C11D3/43 ; H01L21/311 ; G03F7/42
摘要:
This disclosure relates to compositions containing 1) at least one water soluble polar aprotic organic solvent; 2) at least one quaternary ammonium hydroxide; 3) at least one compound comprising at least three hydroxyl groups; 4) at least one carboxylic acid; 5) at least one Group II metal cation; 6) at least one copper corrosion inhibitor selected from the group consisting of 6-substituted-2,4-diamino-1,3,5-triazines; and 7) water. The compositions can effectively strip positive or negative-tone resists or resist residues, and be non-corrosive to bumps and underlying metallization materials (such as SnAg, CuNiSn, CuCoCu, CoSn, Ni, Cu, Al, W, Sn, Co, and the like) on a semiconductor substrate.
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