Invention Grant
- Patent Title: Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby
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Application No.: US14466242Application Date: 2014-08-22
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Publication No.: US10202684B2Publication Date: 2019-02-12
- Inventor: Sean R. Kirkpatrick , Allen R. Kirkpatrick , Michael J. Walsh
- Applicant: Sean R. Kirkpatrick , Allen R. Kirkpatrick , Michael J. Walsh
- Applicant Address: US MA Billerica
- Assignee: EXOGENESIS CORPORATION
- Current Assignee: EXOGENESIS CORPORATION
- Current Assignee Address: US MA Billerica
- Agency: Burns & Levinson LLP
- Agent Jerry Cohen; David W. Gomes
- Main IPC: C23C14/58
- IPC: C23C14/58 ; H01J37/32 ; G02B1/12 ; G02B1/02 ; H01J37/05 ; H01J37/317 ; H01J37/147
Abstract:
A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.
Public/Granted literature
Information query
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