Invention Grant
- Patent Title: Multiple electrode substrate support assembly and phase control system
-
Application No.: US14742142Application Date: 2015-06-17
-
Publication No.: US10153139B2Publication Date: 2018-12-11
- Inventor: Yang Yang , Kartik Ramaswamy , Steven Lane , Lawrence Wong , Shahid Rauf , Andrew Nguyen , Kenneth S. Collins , Roger Alan Lindley
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Implementations described herein provide a substrate support assembly which enables tuning of a plasma within a plasma chamber. In one embodiment, a method for tuning a plasma in a chamber is provided. The method includes providing a first radio frequency power and a direct current power to a first electrode in a substrate support assembly, providing a second radio frequency power to a second electrode in the substrate support assembly at a different location than the first electrode, monitoring parameters of the first and second radio frequency power, and adjusting one or both of the first and second radio frequency power based on the monitored parameters.
Public/Granted literature
- US20160372307A1 MULTIPLE ELECTRODE SUBSTRATE SUPPORT ASSEMBLY AND PHASE CONTROL SYSTEM Public/Granted day:2016-12-22
Information query