- 专利标题: Metal bump joint structure
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申请号: US15419934申请日: 2017-01-30
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公开(公告)号: US10083928B2公开(公告)日: 2018-09-25
- 发明人: Jing-Cheng Lin
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/00 ; H01L25/065 ; H01L25/00
摘要:
A structure comprises a first semiconductor chip with a first metal bump and a second semiconductor chip with a second metal bump. The structure further comprises a solder joint structure electrically connecting the first semiconductor chip and the second semiconductor chip, wherein the solder joint structure comprises an intermetallic compound region between the first metal bump and the second metal bump, wherein the intermetallic compound region is with a first height dimension and a surrounding portion formed along exterior walls of the first metal bump and the second metal bump, wherein the surrounding portion is with a second height dimension, and wherein the second height dimension is greater than the first height dimension.
公开/授权文献
- US20170141067A1 Metal Bump Joint Structure and Methods of Forming 公开/授权日:2017-05-18
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