- 专利标题： Data processing method, data processing apparatus and processing apparatus
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申请号： US14447692申请日： 2014-07-31
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公开(公告)号： US10073818B2公开(公告)日： 2018-09-11
- 发明人: Seiichi Watanabe , Satomi Inoue , Shigeru Nakamoto , Kousuke Fukuchi
- 申请人： Hitachi High-Technologies Corporation
- 申请人地址： JP Tokyo
- 专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Baker Botts L.L.P.
- 优先权： JP2013-246891 20131129; JP2014-111875 20140530
- 主分类号： G06F17/18
- IPC分类号： G06F17/18 ; H01J37/32 ; H01L21/66
摘要：
The present invention is a data processing apparatus including a data input/output device for receiving data, a storage for storing the data received by the data input/output device, a data processing program storage for storing a data processing program that includes the steps of calculating, using a double exponential smoothing method, a first predicted value that is a predicted value of smoothed data and a second predicted value that is a predicted value of the gradient of the smoothed data, and calculating, using a double exponential smoothing method in which the second predicted value is set as input data, a third predicted value that is a predicted value of smoothed data and a fourth predicted value that is a predicted value of the gradient of the smoothed data, and a data calculation processing apparatus for performing the data processing under the data processing program.
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