- 专利标题: 3D TSV assembly method for mass reflow
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申请号: US14413121申请日: 2013-08-29
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公开(公告)号: US10052705B2公开(公告)日: 2018-08-21
- 发明人: Koenraad Alexander Gieskes
- 申请人: UNIVERSAL INSTRUMENTS CORPORATION
- 申请人地址: US NY Conklin
- 专利权人: UNIVERSAL INSTRUMENTS CORPORATION
- 当前专利权人: UNIVERSAL INSTRUMENTS CORPORATION
- 当前专利权人地址: US NY Conklin
- 代理机构: Schmeiser, Olsen & Watts, LLP
- 国际申请: PCT/US2013/057289 WO 20130829
- 国际公布: WO2014/036257 WO 20140306
- 主分类号: B23K1/00
- IPC分类号: B23K1/00 ; B23K3/08 ; H01L23/00 ; H01L25/00 ; B23K3/04 ; H01L25/065
摘要:
Disclosed herein is a method that includes picking up a plate with a nozzle, the plate including at least one opening to allow air to flow therethrough. The method includes picking up a die with the nozzle such that the plate is located between the nozzle and the die. The method includes placing the die and the plate onto a device, substrate or another die such that the plate is located on top of the die. The method includes heating the device, substrate or another die and the die in a heat chamber while the plate remains on top of the die to permanently attach the die to the device, substrate or another die. Further disclosed herein is an assembly system configured to perform a method that utilizes the plate and die combination for attaching the die to a device, substrate or another die by heating.
公开/授权文献
- US20150165537A1 3D TSV ASSEMBLY METHOD FOR MASS REFLOW 公开/授权日:2015-06-18
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