- 专利标题: Microfabricated optical apparatus with grounded metal layer
-
申请号: US15894170申请日: 2018-02-12
-
公开(公告)号: US10050409B2公开(公告)日: 2018-08-14
- 发明人: Christopher S. Gudeman
- 申请人: Innovative Micro Technology
- 申请人地址: US CA Goleta
- 专利权人: Innovative Micro Technology
- 当前专利权人: Innovative Micro Technology
- 当前专利权人地址: US CA Goleta
- 代理商 Jaquelin K. Spong
- 主分类号: H04B10/00
- IPC分类号: H04B10/00 ; H01S5/02 ; B81B7/00 ; B81C1/00 ; H01S5/022 ; H01S5/40 ; H04J14/02 ; H04B10/40 ; H01S5/00 ; H04J14/00
摘要:
A microfabricated optical apparatus that includes a light source driven by a waveform, wherein the waveform is delivered to the light source by at least one through silicon via. The microfabricated optical apparatus may also include a light-sensitive receiver which generates an electrical signal in response to an optical signal. The electrical signal may be communicated to external devices by at least one additional through silicon via, and the signals routed to the encapsulated devices by metal traces. The vias may couple a ground plane to a metal trace layer at intervals, effectively quashing the ability of the bondline to interfere with the absorbed or radiated signal frequency.
公开/授权文献
信息查询