发明授权
- 专利标题： Planar cavity MEMS and related structures, methods of manufacture and design structures
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申请号： US15437727申请日： 2017-02-21
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公开(公告)号： US10011477B2公开(公告)日： 2018-07-03
- 发明人: Christopher V. Jahnes , Anthony K. Stamper
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 代理机构： Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Steven Meyers; Andrew M. Calderon
- 主分类号： H01P1/10
- IPC分类号： H01P1/10 ; B81B3/00 ; B81C1/00 ; G06F17/50
摘要：
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
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