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发明公开
CN110783220A 一种显示面板线路检测结构及其制作方法 失效 - 权利终止

一种显示面板线路检测结构及其制作方法
摘要：
本发明公开了一种显示面板线路检测结构及其制作方法，通过在待检测的薄膜晶体管的预设标识处形成漏斗形凹槽，并且在漏斗形凹槽的斜面上进行金属有机气体的解离，从而避免了高电压下的离子束对薄膜晶体管的膜层产生损伤，除此之外，由于漏斗形凹槽的上半部分的宽深比较大，下半部分结构的宽深比较小，在漏斗形凹槽的斜面上进行金属有机气体的解离，金属有机气体离解后挥发性物质可以容易地从上半部分结构排出，解离后的金属则沿着漏斗形凹槽的斜面滑入下半部分的凹槽中，从而形成检测电极，避免了对薄膜晶体管膜层产生损伤的同时，也减小了检测电极的电阻，有利于提高检测结果的准确性。
摘要（英）：

The invention discloses a display panel circuit detection structure and a manufacturing method thereof. A funnel-shaped groove is formed at a preset identifier of a to-be-detected film transistor, dissociation of metal organic gas is carried out on an inclined surface of a funnel-shaped groove, so damage to a film layer of the film transistor caused by an ion beam under high voltage is avoided; inaddition, a width-depth ratio of an upper half part of the funnel-shaped groove is large, a width-depth ratio of a lower half part structure is small, dissociation of metal organic gas is carried outon the inclined surface of the funnel-shaped groove, after the metal organic gas is dissociated, volatile substances can be easily discharged from the upper half part structure, the dissociated metalslides into the groove in the lower half part along the inclined surface of the funnel-shaped groove, so a detection electrode is formed, resistance of the detection electrode is reduced while damageto the film layer of the film transistor is avoided, and accuracy of a detection result is improved.

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