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发明公开
CN109950162A 提升焊盘超声键合质量的激光表面处理方法 有权

提升焊盘超声键合质量的激光表面处理方法
摘要：
本发明公开了一种提升焊盘超声键合质量的激光表面处理方法，包括以下步骤：将待键合焊盘的表面置于激光器加工位置；采用脉冲激光对焊盘进行表面处理；对处理后的焊盘进行键合。本发明的有益效果：激光表面处理效率高，无机械损伤，一致性好。
摘要（英）：

The invention discloses a laser surface treatment method capable of improving the supersonic bonding quality of a pad. The method comprises the following steps that the surface of the pad to be bondedis placed in a laser processing position; pulse laser is used to treat the surface of pad; and the processed pad is bonded. The method has the advantages that the laser surface treatment efficiency is high, there is no mechanical damage, and the consistence is high.

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