The invention discloses an analysis method for mineral micro-areas, micro-structures and micro-ingredients. Micromorphology analysis, micro-structure analysis, and micro-ingredient analysis are performed on the minerals of siliceous rock by using a scanning electron microscope instrument. According to the analysis method, the measurement result is accurate, and the mineral micro-areas, the micro-structures, and the micro-ingredients of the siliceous rock are analyzed from microscopic scale angles. The cause, the forming environment, and the process of the siliceous rock are explored, thereby deepening the understanding of the siliceous rock.