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CN109075764B 弹性波装置及其制造方法 有权

弹性波装置及其制造方法
Abstract:
本发明提供一种能够提高生产率且能够减小插入损耗的弹性波装置。弹性波装置(1)具备：压电基板(2)；第一IDT电极(4A)～第三IDT电极(4C)，设置在压电基板(2)上；以及电介质膜(5)，设置在压电基板(2)上，使得覆盖第一IDT电极(4A)～第三IDT电极(4C)，且覆盖第一IDT电极(4A)的第一区域(A)的厚度与覆盖第二IDT电极(4B)以及第三IDT电极(4C)的第二区域(B)、第三区域(C)的厚度不同。构成包含第一IDT电极(4A)～第三IDT电极(4C)以及电介质膜(5)的第一弹性波滤波器(3A)～第三弹性波滤波器(3C)(第一弹性波元件～第三弹性波元件)。将如下的厚度设为密度换算厚度，该厚度为将分别构成第一IDT电极(4A)～第三IDT电极(4C)的材料的密度全部设为相同的密度而进行换算的厚度，此时，第一IDT电极(4A)、第二IDT电极(4B)的密度换算厚度相等，第三IDT电极(4C)的密度换算厚度与第一IDT电极(4A)、第二IDT电极(4B)的密度换算厚度不同。
Abstract(English):

An elastic wave device includes a piezoelectric substrate, first to third IDT electrodes provided on the piezoelectric substrate, a dielectric film provided on the piezoelectric substrate and covering the first to third IDT electrodes, the thickness of the dielectric film in a first region in which the dielectric film covers the first IDT electrodes is different from the thickness of the dielectric film in a second region in which the dielectric film covers the second IDT electrodes and the thickness of the dielectric film in a third region in which the dielectric film covers the third IDT electrodes. The density equivalent thickness of each of the first IDT electrodes and the second IDT electrodes are equal to each other, and the density equivalent thickness of each of the third IDT electrodes is different from the density equivalent thickness of each of the first IDT electrodes and the second IDT electrodes.

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