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发明授权
CN108831853B 卸载石墨舟载具中成组硅片的吸盘组件机构及卸载方法 有权

卸载石墨舟载具中成组硅片的吸盘组件机构及卸载方法
摘要：
本发明公开了一种卸载石墨舟载具中成组硅片的吸盘组件机构及卸载方法，解决了真空吸附组件在抓取石墨舟中的成组硅片时容易导致硅片碎裂的问题。在石墨舟载具（1）的正上方设置有真空吸盘组件，在真空吸盘组件的底座（5）上等间隔地设置有向下伸出的吸附板（6），在气管槽（7）内嵌入有台阶状圆柱体真空吸盘（9），台阶状圆柱体真空吸盘（9）通过气管槽（7）内的气管（8）与真空发生器连通，台阶状圆柱体真空吸盘（9）的右侧面设置在台阶状圆柱体真空吸盘（9）所嵌入的吸附板（6）的右侧面的外侧，在台阶状圆柱体真空吸盘（9）的右侧面下端设置有倒角倾斜面（12）。本发明结构简单，实用方便，有效地避免了吸盘将硅片压碎的情况发生。
摘要（英）：

The invention discloses a sucking disc assembly mechanism and unloading method for unloading groups of silicon wafers in a graphite boat carrier so that a problem that groups of silicon wafers in a graphite boat are easy to break when being captured by a vacuum adsorption assembly can be solved. A vacuum sucking disc assembly is arranged right above a graphite boat carrier (1); adsorption plates (6) extending downwardly are arranged on a base (5) of the vacuum sucking disc assembly at equal intervals; and stepped cylindrical vacuum sucking discs (9) are embedded into air tube slots (7) and arecommunicated with a vacuum generator through air tubes (8) in the air tube slots. The right sides of the stepped cylindrical vacuum sucking discs (9) are arranged at the outer sides of the right sides of the adsorption plates (6) into which the stepped cylindrical vacuum sucking discs (9) are embedded; and chamfered inclined surfaces (12) are formed in the lower ends of the right sides of the stepped cylindrical vacuum sucking discs (9). The sucking disc assembly mechanism having a simple structure is used convenient and practically; and a phenomenon of crushing the silicon wafers by the sucking disc is avoided.

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