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发明公开
CN108711558A 静电卡盘表面形貌的制备方法 有权

静电卡盘表面形貌的制备方法
摘要：
本发明公开了一种静电卡盘表面形貌的制备方法，属于静电卡盘领域。所述静电卡盘表面形貌的制备方法包括：步骤1：在静电卡盘的介电层表面涂覆或者贴合保护膜，所述保护膜包括曝光区域和不曝光区域；步骤2：对所述不曝光区域贴合光刻掩膜板，对所述曝光区域进行曝光、显影和清洗；步骤3：对清洗后的曝光区域进行凸点沉积；步骤4：对凸点沉积后的介电层的不曝光区域进行清洗。本发明不仅可以根据不同需求，制备出与介电层材料不同的一层或者多层凸点涂层，满足静电卡盘多方面性能需求，而且该方法工艺简单，易操作，效率高，制备过程更加环保。
摘要（英）：

The invention discloses a preparation method of surface morphology of a static chuck and belongs to the field of static chucks. The preparation method comprises steps of step 1: coating the surface ofthe dielectric layer of the static chuck with a protection film, or adhering the protection film to the surface, wherein the protection film comprises exposure regions and non-exposure regions; step2: adhering a photoetching mask plate to the non-exposure regions and carrying out exposure, development and cleaning on the exposure regions; step 3: carrying out salient point deposition on the cleaned exposure regions; and step 4: cleaning the non-exposure regions of the dielectric layer subjected to the salient point deposition. According to the invention, according to different requirements,one layer or multiple layers of salient point coating layers different from the materials of the dielectric layer are prepared; various kinds of performance requirements of static chuck can be met; the preparation method is simple in processes, easy to operate and high in efficiency; and preparation processes are quite green.

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