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发明授权
CN108656748B 压电器件、MEMS器件、液体喷射头以及液体喷射装置 有权

压电器件、MEMS器件、液体喷射头以及液体喷射装置
摘要：
本发明提供一种在抑制大型化的同时抑制了对置的配线间的短路的压电器件、MEMS器件、液体喷射头以及液体喷出装置。压电器件(致动器单元14)具有：第一基板(压力室形成基板29、振动板31)，其具备压电体层(38)以及至少一部分层压在压电体层(38)上的第一配线(上电极层39)；以及第二基板(密封板33)，其具备被施加与第一配线(上电极层39)不同的电信号的第二配线(下表面侧配线47)，第一配线(上电极层39)与第二配线(下表面侧配线47)以隔开间隔的方式对置，所述压电器件(致动器单元14)的特征在于，第一配线(上电极层39)和第二配线(下表面侧配线47)中的至少一方的配线中的至少一部分被具有绝缘性的保护层(55)覆盖。
摘要（英）：

A piezoelectric device (an actuator unit) includes the following: a first substrate (a pressure chamber forming substrate, a diaphragm) having a piezoelectric layer and a first wiring conductor (a top electrode layer) that is at least partially stacked on the piezoelectric layer; and a second substrate (a sealing substrate) having a second wiring conductor (a bottom wiring conductor) that faces and is separated from the first wiring conductor (a top electrode layer) and to which an electrical signal different from an electrical signal that is applied to the first wiring conductor (a top electrode layer) is applied. At least one of the first wiring conductor (a top electrode layer) and the second wiring conductor (a bottom wiring conductor) is at least partially covered with an electrically insulating protective layer.

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