The invention discloses a manipulator for silicon wafer cleaning, and belongs to the technical field of silicon wafer cleaning. The manipulator comprises a base, a lifting drive mechanism, a fixture machine head, a base sidesway drive mechanism and two clamping jaws, wherein the lower end of the lifting drive mechanism is connected with the base, and the lifting drive mechanism is used for drivingthe fixture machine head and the clamping jaws to move in the vertical direction; the fixture machine head is installed at the top of the lifting drive mechanism, and used for driving the two clamping jaws to clamp and release a silicon wafer through a first drive rod and a second drive rod; and the base sidesway drive mechanism is installed at the side part of the base, and used for driving thebase to move in the horizontal direction. According to the manipulator, the two clamping jaws are used for clamping the silicon wafer, and cleaning for the silicon wafer in a cleaning groove is realized through the movement of the clamping jaws in the horizontal direction, so that the washing of a cleaning liquid for the surface of the silicon wafer is improved, the cleaning effect for the siliconwafer is improved, and the cleaning efficiency for the silicon wafer is increased; and the side part of the silicon wafer is clamped by virtue of the clamping jaws, so that the surface of the siliconwafer can be effectively protected from being damaged.