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发明公开
CN108123695A 体声波谐振器 有权

体声波谐振器
摘要：
本发明提供一种体声波谐振器。所述体声波谐振器包括：膜层，与基板一起形成腔；下电极，设置在所述膜层上；压电层，设置在所述下电极的平坦表面上；以及上电极，覆盖所述压电层的一部分。所述压电层的侧部的整个区域暴露于空气。所述压电层的所述侧部相对于所述下电极的顶表面具有65°到90°的倾斜度。
摘要（英）：

A bulk acoustic wave resonator includes a membrane layer, together with a substrate, forming a cavity, a lower electrode disposed on the membrane layer, a piezoelectric layer disposed on a flat surface of the lower electrode and an upper electrode covering a portion of the piezoelectric layer. An overall region at a side of the piezoelectric layer is exposed to the air. The side of the piezoelectric layer has a gradient of 65° to 90° with respect to a top surface of the lower electrode.

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