The invention provides a precision control device and method for laser indirect impact micro molding, and relates to the technical field of laser machining of micro electro mechanical system parts. The precision control device comprises a laser loading system, an ultrasonic vibration system, a debugging optical light spot-mold cavity centering assembly, a workpiece assembly and a control system. By means of the precision control device, the impact force of a pulse laser is adopted as an energy source, meanwhile, ultrasonic vibration is applied to a mold and a workpiece, the molding limitationand the molding quality of the workpiece are improved, and the precision control device is suitable for materials which are difficult to mold or cannot be molded by using a conventional laser impact micro molding method. Meanwhile, the movement situation of a motor can be monitored and fed back through a coder, the movement situations of a front-back platform and a left-right platform can be monitored and fed back through a grating ruler displacement sensor, and accordingly the precision of a three-dimensional movable platform can be improved. The precision control device is suitable for achieving large-area mold molding and multi-working-station laser impact molding, so that the workpiece precisely duplicates the morphology of the mold, or batch molding of the workpiece is completed simultaneously, and thus the working efficiency is improved.