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发明授权
CN107663080B 应用于J-R型静电卡盘的氧化铝陶瓷及其制备方法 有权

应用于J-R型静电卡盘的氧化铝陶瓷及其制备方法
摘要：
本发明公开了一种应用于J‑R型静电卡盘的氧化铝陶瓷及其制备方法，属于半导体材料领域。所述氧化铝陶瓷材料由以下重量份的组分组成：α‑氧化铝82‑88％、二氧化钛7‑10％、氧化镁0.5‑2％、二氧化硅2‑5.5％。上述氧化铝陶瓷的制备方法采用流延成型工艺，得到的氧化铝陶瓷材料体积电阻率在100‑1000V电压范围内能控制在109‑1011Ω·cm之间，可以作为理想的J‑R型静电卡盘的介电材料。
摘要（英）：

The invention discloses alumina ceramic applied to a J-R type electrostatic chuck and a preparation method of the alumina ceramic and belongs to the field of semiconductor materials. The alumina ceramic material is prepared from components in percentage by weight as follows: 82%-88% of alpha-alumina, 7%-10% of titanium dioxide, 0.5%-2% of magnesium oxide and 2%-5.5% of silicon dioxide. A tape casting technology is adopted in the preparation method of the alumina ceramic, and the obtained alumina ceramic material has the volume resistivity controlled in the range of 10<9>-10<11> omega.cm in thevoltage range of 100-1,000 V and can be used as an ideal dielectric material of the J-R type electrostatic chuck.

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