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发明公开
CN107202665A 压力测定装置、排气系统以及基板处理装置 有权

压力测定装置、排气系统以及基板处理装置
摘要：
本发明提供一种压力测定装置、排气系统以及基板处理装置。压力测定装置具有：第一压力计，其与能够对处理对象进行处理的处理室连接并能够测定正在对所述处理对象进行处理时的所述处理室内的压力；第二压力计，其与所述处理室连接；以及切换阀，在所述处理室内正在对所述处理对象进行处理时，所述切换阀能够将所述第二压力计与所述处理室之间的连接断开。
摘要（英）：

There is provided a pressure measuring device including: a first pressure gauge connected to a processing chamber configured to process a process target and configured to measure an internal pressure of the processing chamber when the process target is being processed; a second pressure gauge connected to the processing chamber; and a first switching valve configured to disconnect the second pressure gauge from the processing chamber when the process target is being processed inside the processing chamber.

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