The invention discloses a high energy ion implantation machine radio frequency acceleration tuning device. The high energy ion implantation machine radio frequency acceleration tuning device comprises a radio frequency power supply, a tuning controller, a tuning cylinder and a tuning motor; the tuning controller comprises a tuning control unit, a tuning motor control unit and a resonant state detection unit; the tuning control unit is respectively connected to the tuning motor control unit and the resonant state detection unit; and the tuning motor is connected to the tuning motor control unit. The high energy ion implantation machine radio frequency acceleration tuning control method comprises that: 1) a resonant detection unit is used for detecting an output signal of the radio frequency power supply and transmitting the output signal to the tuning control unit; 2) the tuning control unit is used for outputting a control signal to a resonant motor control unit according to the output signal of the radio frequency power supply; and 3) the tuning motor control unit controls resonance of the tuning motor according to the control signal in order to make the resonant cylinder in a resonance state. The high energy ion implantation machine radio frequency acceleration tuning device and control method are simple in operation and accurate in control.